Z-Theta Air Bearing Stage

Precision Z-Theta Positioner Head --Ideal for Flip Chip Bonders!

ABTech's Z-Theta positioning head combines precision rotary and linear motion in a compact single unit which can be mounted to X-Y gantries or other types of positioning systems, providing two additional axes of motion.

The compact 150mm (6.0") square unit contains the unique dual air bearing system. Both the Theta and Z air bearings are fully constrained for maximum stiffness and performance. One air supply feeds both bearings. The Theta features a 150mm (6.0") diameter thrust area and the Z axis is a 50mm (2.0") square precision rail. The Z rail provides better than 1.0µm (40µ") straightness over full travel, which ensures accurate work piece placement without the aid of control system compensation. The system can produce and support up to 45.4Kg (100lbs.) of force in the Z direction.

The Theta axis has 210° of travel available with electrical limits and hard stops. The Z axis travel is 50mm (2.0") with electrical limits and hard stops as well.

ABTech's modular design approach and full engineering services can respond quickly to provide a solution to your O.E.M. needs for ultra-precision motion.

Click here for high-resolution, printable data sheet (248K PDF)

Features

Fully constrained rotary air bearing - Theta Axis
Fully constrained within Theta, linear air bearing - Z Axis
Ultra-smooth dual motion
210° Theta rotation
1.0µm(40µ") or less, Z Axis straightness in 50mm (2.0")
Rotary DC brushless servo on Theta Axis
Precision ball screw & stepper drive on Z-Axis
Non-influence ball screw coupling
High resolution encoder
End of travel limits & hard stops
Low air consumption
Turn key systems available to O.E.M.s