Optical Lens Alignment Air Bearing Axes

Large diameter, clear aperture air bearing reference axis

ABTech's air bearing spin tables make ideal reference axes for assembly and inspection of precision and ultra-precision multi-element lens assemblies. The large diameter, clear aperture system shown here is a prime example of the level of commitment to our O.E.M. customers in supplying a custom motion solution for a very demanding lens alignment application.

ABTech, Inc. worked with a leading manufacturer of lithography systems to develop this 17" diameter clear aperture, air bearing rotary table for large optical lens cell alignment assembly. The rotating center portion of the air bearing is used for mounting the lens cells custom fixturing. The O.E.M. uses a proprietary laser process in conjunction with the axis for alignment. The air bearing is supported by two trunion bearings to allow for rotation of the centerline from vertical to horizontal.

Radial and axial error motion of the air bearing is better than 0.1µm(4.0µ").

Additional sizes as well as motor drives and controls can be supplied.

Click here for high-resolution, printable data sheet (112K PDF)

Features

Ultra-smooth rotary motion
Through hole design
Radial/axial error motions to 1µ"(0.025µm)
Angular error motions: 1µ"/in.(0.025µm/25mm)
High load capacity
Low air consumption
Modular design
Custom O.E.M. designs
Motor drives/controllers
Clean room compatible