| |  Ultra-Smooth Motorized Rotary & Linear Motion -- Ideal for Wafer Scanning!
ABTech's X-Theta stage combines ultra-precision rotary and linear air bearing stages with DC brushless motors and high resolution non-contact encoders to produce the ultimate smooth moving stage, ideally suited for wafer scanning machine applications.
These stages are designed for cleanroom environments, incorporating appropriate materials, part cleaning and ABTech's unique "Contained Exhaust Technology" or CET feature. The CET feature allows the air bearing exhaust to be drawn to a common port, where a vacuum supply can be connected to take the exhaust flow away from the work area. This is critical in some applications where particle flow arround work surfaces may cause contamination.
The X axis stage is based on ABTech's MLAB 7750 Series, air bearing linear slides with modifications to materials and containing the CET feature. The Theta or rotary axis is a custom 150mm diameter air bearing rotary spin table with a DC brushless motor integrally built into the lower thrust plate. The CET feature is incorporated in this axis as well. The table is fitted with a 216mm diameter intermediate vacuum chuck adapter. A vacuum can be connected to the side of the Theta axis where the vacuum is ported through the stage and jumps an air gap to get through to the chuck adapter. No rotary unions are required. Click here for high-resolution, printable data sheet (200K PDF) Features - Magnetically preloaded linear air bearing for X-Axis
- Fully constrained rotary air bearing spin table - Theta Axis
- "Contained Exhaust Technology" feature
- Clean room compatible
- Ultra-smooth motion, no static friction
- Linear & rotary DC brushless motors
- High resolution encoders
- Total noncontact component design - "no parts to wear"
- Intermediate vacuum chuck worktable w/ internal porting
- Low air consumption
- Custom tooling and fixturing design and manufacturing
- Turn key systems available to O.E.M.s
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